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1)

迄まで

#43
Common
Meaning
  1. 1
    until (a time); till; to; up to
    １０時じゅうじまでに夕食ゆうしょくの準備じゅんびをしておくように取とり計はからいなさい。
    See that dinner is ready by ten.
  2. 2
    to (a place or person); as far as
  3. 3
    to (an extent); up to; so far as; even
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Kanji
迄 キツ until, up to, as far as
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2)

までも

#24,080
Common
Meaning
  1. 1
    to (an extent); up to; so far as; even
    more emphatic than まで
    See also: 迄 (まで)
  2. 2
    there is no need to ...; it should hardly be necessary to ...
    as ...までもない
    See also: までも無い (までもない)
  3. 3
    even if there is no need to ... (at least ...)
    as ...ないまでも
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3)

までに

#96,844
Pitch accent
ま で に
Meaning
  1. by; not later than; before
    昭和天皇しょうわてんのうが靖国神社やすくにじんじゃで７５ななじゅうご年ねんまでに戦後せんご計けい８はち回かい参拝さんぱいした。
    In the post-War period, up until 1975, Emperor Showa prayed at the Yasukuni Shrine a total of 8 times.
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